Thin-film deposition by combining plasma jet with spark dis… — КазНУ

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Thin-film deposition by combining plasma jet with spark discharge source at atmospheric pressure

2021 · Article

Год публикации

2021

CiteScore

2,5

SJR

0,448

SNIP

0,6

Источник: Contributions to Plasma Physics

DOI:

Scopus:

Области знаний

Condensed Matter Physics