The electrical asymmetry effect in electronegative CF4 capa… — КазНУ

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The electrical asymmetry effect in electronegative CF4 capacitive RF plasmas operated in the striation mode

2023 · Article

Год публикации

2023

CiteScore

7,1

SJR

0,771

SNIP

1,4

Источник: Plasma Sources Science and Technology

DOI:

Scopus:

Цели устойчивого развития (2025)

SDG 7

Области знаний

Condensed Matter Physics