The electrical asymmetry effect in electronegative CF4 capa鈥arabi University

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The electrical asymmetry effect in electronegative CF4 capacitive RF plasmas operated in the striation mode

2023 路 Article
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Publication year

2023

CiteScore

7,1

SJR

0,771

SNIP

1,4

Authors

Source: Plasma Sources Science and Technology

DOI:

Fields of knowledge

Condensed Matter Physics