NANOPARTICLE SYNTHESIS BY THE PECVD METHOD BASED ON RF DISC… — КазНУ

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NANOPARTICLE SYNTHESIS BY THE PECVD METHOD BASED ON RF DISCHARGE

2023 · Article

Год публикации

2023

Источник: Herald of the Kazakh British Technical UNiversity

DOI:

Scopus:

Области знаний

Multidisciplinary