NANOPARTICLE SYNTHESIS BY THE PECVD METHOD BASED ON RF DISC鈥� 鈥� KazNU

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NANOPARTICLE SYNTHESIS BY THE PECVD METHOD BASED ON RF DISCHARGE

2023 路 Article
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Publication year

2023

Authors

Source: Herald of the Kazakh British Technical UNiversity

DOI:

Scopus:

Fields of knowledge

Multidisciplinary