Self-bias voltage formation and charged particle dynamics i鈥arabi University

91传媒

Self-bias voltage formation and charged particle dynamics in multi-frequency capacitively coupled plasmas

2021 路 Article
袧邪蟹邪写 泻 锌褍斜谢懈泻邪褑懈褟屑

袚芯写 锌褍斜谢懈泻邪褑懈懈

2021

CiteScore

2,9

SJR

0,375

SNIP

0,63

袗胁褌芯褉褘

袠褋褌芯褔薪懈泻: AIP Advances

DOI:

袨斜谢邪褋褌懈 蟹薪邪薪懈泄

General Physics and Astronomy