Self-bias voltage formation and charged particle dynamics i鈥arabi University

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Self-bias voltage formation and charged particle dynamics in multi-frequency capacitively coupled plasmas

2021 路 Article
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Publication year

2021

CiteScore

2,9

SJR

0,375

SNIP

0,63

Authors

Source: AIP Advances

DOI:

Scopus:

Fields of knowledge

General Physics and Astronomy