Experimental and numerical study of the ionization-attachme… — ҚазҰУ

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Experimental and numerical study of the ionization-attachment instability in an O2 capacitively coupled radio frequency plasma

2025 · Article

Жариялану жылы

2025

Дереккөз: Plasma Sources Science and Technology

DOI:

Scopus:

Білім салалары

Condensed Matter Physics