On the in-situ determination of the effective secondary ele鈥� 鈥� 袣邪蟹袧校

91传媒

On the in-situ determination of the effective secondary electron emission coefficient in low pressure capacitively coupled radio frequency discharges based on the electrical asymmetry effect

2025 路 Article
袧邪蟹邪写 泻 锌褍斜谢懈泻邪褑懈褟屑

袚芯写 锌褍斜谢懈泻邪褑懈懈

2025

袗胁褌芯褉褘

袠褋褌芯褔薪懈泻: Journal of Physics D: Applied Physics

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袨斜谢邪褋褌懈 蟹薪邪薪懈泄

Electronic, Optical and Magnetic Materials Surfaces, Coatings and Films Acoustics and Ultrasonics Condensed Matter Physics