On the in-situ determination of the effective secondary ele鈥arabi University

91传媒

On the in-situ determination of the effective secondary electron emission coefficient in low pressure capacitively coupled radio frequency discharges based on the electrical asymmetry effect

2025 路 Article
袞邪褉懈褟谢邪薪褘屑写邪褉覔邪 芯褉邪谢褍

袞邪褉懈褟谢邪薪褍 卸褘谢褘

2025

袗胁褌芯褉谢邪褉

袛械褉械泻泻萤蟹: Journal of Physics D: Applied Physics

DOI:

袘褨谢褨屑 褋邪谢邪谢邪褉褘

Electronic, Optical and Magnetic Materials Surfaces, Coatings and Films Acoustics and Ultrasonics Condensed Matter Physics