On the in-situ determination of the effective secondary ele鈥� 鈥� KazNU

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On the in-situ determination of the effective secondary electron emission coefficient in low pressure capacitively coupled radio frequency discharges based on the electrical asymmetry effect

2025 路 Article
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Publication year

2025

Authors

Source: Journal of Physics D: Applied Physics

DOI:

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Fields of knowledge

Electronic, Optical and Magnetic Materials Surfaces, Coatings and Films Acoustics and Ultrasonics Condensed Matter Physics