The performance of LaAlOx gate dielectric films prepared by… — ҚазҰУ

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The performance of LaAlOx gate dielectric films prepared by sol-gel method at different temperatures of annealing

2026 · Article

Жариялану жылы

2026

Дереккөз: Journal of Sol-Gel Science and Technology

DOI:

Scopus:

Білім салалары

General Chemistry Biomaterials Ceramics and Composites Electronic, Optical and Magnetic Materials Materials Chemistry Condensed Matter Physics