The performance of LaAlOx gate dielectric films prepared by鈥arabi University

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The performance of LaAlOx gate dielectric films prepared by sol-gel method at different temperatures of annealing

2026 路 Article
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Publication year

2026

Authors

Source: Journal of Sol-Gel Science and Technology

DOI:

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Fields of knowledge

General Chemistry Biomaterials Ceramics and Composites Electronic, Optical and Magnetic Materials Materials Chemistry Condensed Matter Physics