DETERMINATION OF RESIST CONTRAST IN ELECTRON BEAM LITHOGRAP鈥arabi University

91传媒

DETERMINATION OF RESIST CONTRAST IN ELECTRON BEAM LITHOGRAPHY UNDER DEPTH-DEPENDENT NONUNIFORM ENERGY DEPOSITION

2025 路 Article
袞邪褉懈褟谢邪薪褘屑写邪褉覔邪 芯褉邪谢褍

袞邪褉懈褟谢邪薪褍 卸褘谢褘

2025

袗胁褌芯褉谢邪褉

袛械褉械泻泻萤蟹: Herald of the Kazakh British Technical UNiversity

DOI:

Scopus:

袘褨谢褨屑 褋邪谢邪谢邪褉褘

Multidisciplinary