DETERMINATION OF RESIST CONTRAST IN ELECTRON BEAM LITHOGRAP鈥arabi University

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DETERMINATION OF RESIST CONTRAST IN ELECTRON BEAM LITHOGRAPHY UNDER DEPTH-DEPENDENT NONUNIFORM ENERGY DEPOSITION

2025 路 Article
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Publication year

2025

Authors

Source: Herald of the Kazakh British Technical UNiversity

DOI:

Scopus:

Fields of knowledge

Multidisciplinary