The electrical asymmetry effect in electronegative CF4 capa鈥arabi University

91传媒

The electrical asymmetry effect in electronegative CF4 capacitive RF plasmas operated in the striation mode

2023 路 Article
袧邪蟹邪写 泻 锌褍斜谢懈泻邪褑懈褟屑

袚芯写 锌褍斜谢懈泻邪褑懈懈

2023

CiteScore

7,1

SJR

0,771

SNIP

1,4

袗胁褌芯褉褘

袠褋褌芯褔薪懈泻: Plasma Sources Science and Technology

DOI:

袨斜谢邪褋褌懈 蟹薪邪薪懈泄

Condensed Matter Physics