Exploring the influence of Al content on the optical and in鈥� 鈥� 覛邪蟹野校

91传媒

Exploring the influence of Al content on the optical and interface properties of HfAlOx mixed gate dielectric thin films and their applications in MOS devices

2024 路 Article
袞邪褉懈褟谢邪薪褘屑写邪褉覔邪 芯褉邪谢褍

袞邪褉懈褟谢邪薪褍 卸褘谢褘

2024

袗胁褌芯褉谢邪褉

袛械褉械泻泻萤蟹: Journal of Materials Science: Materials in Electronics

DOI:

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袘褨谢褨屑 褋邪谢邪谢邪褉褘

Electrical and Electronic Engineering Electronic, Optical and Magnetic Materials Condensed Matter Physics Atomic and Molecular Physics, and Optics