Preparation and performance optimization of HfAlO hybrid ga鈥� 鈥� KazNU

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Preparation and performance optimization of HfAlO hybrid gate dielectric thin films driven by solution

2024 路 Article
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Publication year

2024

Authors

Source: Journal of Sol-Gel Science and Technology

DOI:

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Fields of knowledge

General Chemistry Biomaterials Ceramics and Composites Electronic, Optical and Magnetic Materials Materials Chemistry Condensed Matter Physics