Electron Irradiation-Induced Degradation of TiN Thin Films 鈥arabi University

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Electron Irradiation-Induced Degradation of TiN Thin Films on Quartz and Sapphire Substrates

2024 路 Article
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Publication year

2024

CiteScore

7,1

SJR

0,773

SNIP

1,01

Authors

Source: ACS Omega

DOI:

Scopus:

Sustainable Development Goals

SDG 7

Fields of knowledge

General Chemical Engineering General Chemistry